Thermal Oxidation Michael 2018-03-12 22:30 A20180312009 進階 點閱 104 留言 0 E 0 T 0 免費 進階 點閱 104 留言 0 E 0 T 0 Thermal oxidation belongs to Chemical Vapor Deposition and may rapidly grow dense oxide film with uniform thickness on a substrate. The cost is lower and it’s suitable for mass production in factory. (共同作者:Hightech)